Laterally-driven deformation-robust MEMS gyroscopes with three sets of symmetrically arranged folded-beam suspensions

摘要

Microelectromechanical systems (MEMS) vibratory gyroscopes are used in a wide range of applications. Gyroscopes which have long-term stability and high-reliability even when they are used in harsh environments such as in a wide range of temperatures will be useful for automotive systems and robotics applications. We report a deformation-robust gyroscope, which has three sets of symmetrically arranged folded beams (SAF), which cancel and/or dissipate deformation or internal stress over a wide range of temperatures. In addition, we found that a triangularly supported one-sided open frame by the SAF separated spurious modes from the drive and sensing modes.