Development of Nano Order Manipulation System based on 3-PPR Planar Parallel Mechanism

摘要

This paper describes one approach to build a nano order precision robot manipulator stage. We propose conceptual design of 6 dof manipulator structure, 3 dof in plane motion and 3 dof out plane motion. Especially, in plane motion, we proposed a 3-PPR planar parallel manipulator, which consists of three active prismatic joints, three passive prismatic joints, and three passive rotational joints. The analysis of the kinematics and the optimal design of the manipulator are also discussed. The proposed manipulator has the advantages of the closed type of direct kinematics and a void-free workspace with a convex type of borderline. In actual application, we let the connection between active and passive prismatic joint to be right angle for easy to control. For the kinematics analysis of the proposed manipulator, the direct and inverse kinematics were derived. As a physical mechanism of 3-PPR manipulator, we propose flexure hinge mechanism. In addition, in plane motion stage was constructed and the actuator components, the piezo actuator devices, are specified and tested for application. Finally, about the remote control system, not implemented yet, discussed on concept design level.