Assembly technology across multiple length scales from the micro-scale to the nano-scale

摘要

Directed microassembly and nanoassembly is performed by using appropriately-sized end-effectors coupled to macro-robotic systems. The larger end-effectors are made via microelectromechanical systems (MEMS) fabrication processes and can handle components ranging from hundreds of microns in size down to ten nanometers. Smaller end-effectors are etched tungsten probes capable of manipulating nano-scale objects. We demonstrate automated and semi-automated microscale assembly while nanoscale assembly is currently done only in semi-automated ways. Resultant assembled devices include three-dimensional MEMS assemblies and carbon nanotube structures.