Novel inductive eddy current sensor for angle measurement

摘要

This work presents the development of novel inductive microsensors for angle measurement. Due to the robust and special design they are suitable for integration into rotary or cardan joints of e.g. high-performance parallel robots. Their measuring method is based on inductive scanning of a micro scale with a circular arranged graduation comparable to the functionality of optical incremental encoders. Now the applicability of the eddy current effect on the described angle measurement task is explored. Besides the basic design and process technology of the single sensor components we present first measurement results and an example of joint-integration.