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MEMS tri-axial force sensor with an integrated mechanical stopper for guidewire applications

Woo‐Tae Park, Rama Krishna Kotlanka, Liang Lou, Muhammad Hamidullah, Chengkuo Lee

发表年份
2012
引用次数
31

关键词

Microelectromechanical systemsPiezoresistive effectStylusRobustness (evolution)Materials scienceFinite element methodMechanical engineeringAcousticsElectronic engineeringOptoelectronics

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