Highly Sensitive 1T‐MoS₂ Pressure Sensor with Wide Linearity Based on Hierarchical Microstructures of Leaf Vein as Spacer

摘要

Abstract Flexible pressure sensors have attracted considerable interest for their promising applications in future robotics and wearable devices. Pressure sensors with high sensitivity and a wide linear range do not require complex signal processing, and greatly enhance device miniaturization and decrease power consumption. High‐performance pressure sensors are prepared based on 1T molybdenum disulfide within polydimethylsiloxane foams (MoS 2 ‐PDMS) as conductive active layer and with hierarchical micro‐network leaf vein as spacers. Due to the excellent electrical conductivity of 1T MoS 2 ‐PDMS and the novel structural design, they exhibit better properties than previously reported devices, including a high sensitivity of 1036.04 kPa −1 over a wide linear range from 1 to 23 kPa, fast response time (<50 ms), ultralow detectable pressure limit of 6.2 Pa, and excellent repetitive load and unloading stability (10 000 cycles). In addition, its applications in sensing subtle pressure and non‐contact breeze and in monitoring different human motion activities and physiological signals are explored. Some new applications including water pressure testing and subtle fluctuations in water caused by small fish swimming are also investigated. The results demonstrate the tested applications of layered 2D materials in pressure sensors that can be feasibly adopted in next‐generation electronic skin and artificial intelligence.