Design and manufacturing rules for maximizing the performance of polycrystalline piezoelectric bending actuators

摘要

Increasing the energy and power density of piezoelectric actuators is very important for any weight-sensitive application, and is especially crucial for enabling autonomy in micro/milli-scale robots and devices utilizing this technology. This is achieved by maximizing the mechanical flexural strength and electrical dielectric strength through the use of laser-induced melting or polishing, insulating edge coating, and crack-arresting features, combined with features for rigid ground attachments to maximize force output. Manufacturing techniques have also been developed to enable mass customization, in which sheets of material are pre-stacked to form a laminate from which nearly arbitrary planar actuator designs can be fabricated using only laser cutting. These techniques have led to a 70% increase in energy density and an increase in mean lifetime of at least 15× compared to prior manufacturing methods. In addition, measurements have revealed a doubling of the piezoelectric coefficient when operating at the high fields necessary to achieve maximal energy densities, along with an increase in the Young's modulus at the high compressive strains encountered—these two effects help to explain the higher performance of our actuators as compared to that predicted by linear models.