Electron-beam lithography

3D electron-beam writing at sub-15 nm resolution using spider silk as a resist

Nan Qin, Zhi‐Gang Qian, Chengzhe Zhou, Xiao‐Xia Xia, Tiger H. Tao

Citations: 60 • 2021

E-Beam Nanostructuring and Direct Click Biofunctionalization of Thiol–Ene Resist

Reza Zandi Shafagh, Alexander Vastesson, Weijin Guo, Wouter van der Wijngaart, Tommy Haraldsson

Citations: 52 • 2018

Three-Dimensional Soft Material Micropatterning via Direct Laser Lithography of Flexible Molds

Irene Bernardeschi, Omar Tricinci, Virgilio Mattoli, Carlo Filippeschi, Barbara Mazzolai, Lucia Beccai

Citations: 23 • 2016

EBES4: A new electron-beam exposure system

D. S. Alles, C. J. Biddick, John H. Bruning, J.T. Clemens, R.J. Collier, E. A. Gere, L. R. Harriott, F. Leone, R. Liu, Timothy Mulrooney, Richard J. Nielsen, Neha Paras, R. M. Richman, C. M. Rose, Dov Rosenfeld, D. E. A. Smith, M. G. R. Thomson

Citations: 19 • 1987

Two-photon laser lithography in optical metrology

Julian Hering, Matthias Eifler, Jörg Seewig, Georg von Freymann, Linda Hofherr, Christiane Ziegler

Citations: 12 • 2018

A sub-micron metallic electrothermal gripper

Daniel Sang-Won Park, Arun K. Nallani, DonKyu Cha, Gil-Sik Lee, Moon J. Kim, George D. Skidmore, Jeong‐Bong Lee

Citations: 12 • 2009

Macrophage-compatible magnetic achiral nanorobots fabricated by electron beam lithography

Teng Jiang, Xiaoxia Song, Xueliang Mu, U Kei Cheang

Citations: 8 • 2022

Patterned, morphing composites <i>via</i> maskless photo-click lithography

Shida Lyu, Fei Zheng, Julio Adrian Aguilar-Tadeo, Fei Lin, Rui Wu, Brian Derby, Ian A. Kinloch, Constantinos Soutis, Matthieu Grésil, Jonny J. Blaker

Citations: 3 • 2020

Direct Patterning of Ionic Polymers with E-Beam Lithography

Annina M. Steinbach, Stefan Jenisch, Parisa Bakhtiarpour, Masoud Amirkhani, Steffen Strehle

Citations: 2 • 2016

&lt;title&gt;New electron-beam mask writing system for 0.25-um lithography&lt;/title&gt;

Hidetoshi Satoh, Yasuhiro Someda, Norio Saitou, K. Kawasaki, Kazui Mizuno

Citations: 2 • 1996

In-Situ Ring Assembled Inner Tubular Fabrication by Optofluidic Maskless Lithography for Soft Robotics and Medical Devices Inspired From Segment Construction of Shield Tunnel Technology

Yingzhe Wang, Keisuke Morishima

Citations: 1 • 2025