Chemical-mechanical planarization

Novel automated process for aspheric surfaces

R. Bingham, David Walker, Do Hyung Kim, David Brooks, R. R. Freeman, Darren L. Riley

Citations: 108 • 2000

Efficient automatic polishing process with a new compliant abrasive tool

Meng‐Shan Tsai, Jian-Mi Huang

Citations: 101 • 2006

Electrochemical mechanical polishing technology: recent developments and future research and industrial needs

Abdelkhalick Mohammad, Danwei Wang

Citations: 90 • 2016

Throughput optimization in dual-gripper interval robotic cells

Milind Dawande, H. Neil Geismar, Michael Pinedo, Chelliah Sriskandarajah

Citations: 53 • 2009

Synergistic integrated design of an electrochemical mechanical polishing end-effector for robotic polishing applications

Abdelkhalick Mohammad, Jie Hong, Danwei Wang, Yisheng Guan

Citations: 52 • 2018

High Performance, High Density RDL for Advanced Packaging

Chengpu Yu, Luo‐Ting Yen, C. Y. Hsieh, Jeng-Sheng Hsieh, Victor C. Y. Chang, C.H. Hsieh, C. S. Liu, C. T. Wang, KC Yee, Doug C. H. Yu

Citations: 43 • 2018

Experimental investigation into the effect of abrasive and force conditions in magnetic field-assisted finishing

Jiang Guo, Zhi’En Eddie Tan, Ka Hing Au, Kui Liu

Citations: 35 • 2016

Research on an evaluation model for the working stiffness of a robot-assisted bonnet polishing system

Ri Pan, Wanying Zhao, Zhenzhong Wang, Shuting Ji, Xiangsheng Gao, Dongju Chen, Jinwei Fan

Citations: 35 • 2021

Atomic surface induced by novel green chemical mechanical polishing for aspheric thin-walled crucibles with large diameters

Xiangxiang Cui, Zhenyu Zhang, Chunjing Shi, Qibo Peng, Xiaoyu Liu, Xiuqing Liu, Hongxiu Zhou, Junyuan Feng, Wei Wen

Citations: 34 • 2024

Development of a force controlled orbital polishing head for free form surface finishing

Christian Brecher, Roland Tuecks, Richard Zunke, Christian Wenzel

Citations: 32 • 2010

A novel mechatronics design of an electrochemical mechanical end-effector for robotic-based surface polishing

Abdelkhalick Mohammad, Danwei Wang

Citations: 25 • 2015

Investigation on the polishing of aspheric surfaces with a doughnut-shaped magnetic compound fluid (MCF) tool using an industrial robot

Ming Feng, Yongbo Wu, Youliang Wang, Jiang Zeng, Teruo Bitoh, Mitsuyoshi Nomura, Tatsuya Fujii

Citations: 23 • 2019

Surface passivation and brightening of titanium-based AM materials using a robotic electrochemical mechanical polishing system

Jung-Chou Hung, Po‐Jen Yang, Xuan-Han Lin, Shun-Yi Jian, Chun-Hsiang Kao, Yi‐Cherng Ferng, Ying-Sun Huang, Kuo‐Kuang Jen

Citations: 6 • 2024

Machine learning robot polishing cell

Max Schneckenburger, Luis Barth, Rainer Börret

Citations: 6 • 2019

Investigation of Eco-Friendly Fixed-Abrasive Polishing with Compact Robot

Sachiko Ogawa, Shinpei Okumura, Toshiki HIROGAKI, Yoshiaki Onchi

Citations: 6 • 2010

Influence of Polishing and Pressing Force on the Material Removal Rate in Fixed Abrasive Polishing with Compact Robot

Masaki Niwa, Sachiko Ogawa, Toshiki HIROGAKI, Eiichi AOYAMA, Yoshiaki Onchi

Citations: 5 • 2012

Polishing Using Flexible Abrasive Tools and Loose Abrasives

Han Huang, Libo ZHOU, Ling Yin

Citations: 5 • 2010

Study on optimization of the dynamic performance of the robot bonnet polishing system

Ri Pan, Chunfu Hu, Jinwei Fan, Zhenzhong Wang, Xuepeng Huang, Feng Lu

Citations: 4 • 2023

Does one need to polish electrodes in an eight pattern? Automation provides the answer.

Naruki Yoshikawa, Gun Deniz Akkoc, Sergio Pablo‐García, Yang Cao, Han Hao, Alán Aspuru‐Guzik

Citations: 4 • 2024

MCF (Magnetic Compound Fluid) Polishing Process for Free-formed Resin Device using Robotic Arm

Yawen Wu, Takashi Satō, Weimin Lin, Ken Yamamoto, Kunio Shimada, Francisco Chinesta, Yvan Chastel, Mohamed El Mansori

Citations: 4 • 2011