Peter J. de Groot

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About

Peter J. de Groot is a leading figure in optical metrology, with his most influential work centering on interferometry, surface profiling, and precision measurement. He is best known for pioneering the development of white light scanning interferometry, a technique that revolutionized the non-contact measurement of surface topography. De Groot’s contributions have enabled sub-nanometer accuracy in three-dimensional surface characterization, profoundly impacting industries from semiconductor manufacturing to biomedical optics. His highly cited papers, collectively garnering thousands of citations, include foundational works on coherence scanning interferometry and the correction of optical errors in imaging systems. Among his notable achievements, de Groot has received multiple awards, including the SPIE Gold Medal, and has authored over 100 peer-reviewed articles. His early research, such as the development of a laser radar array for simultaneous ranging and velocimetry, laid the groundwork for his later breakthroughs. Today, de Groot continues to advance the field as a Chief Scientist at Zygo Corporation, where his innovations in optical metrology remain essential for high-precision engineering and scientific discovery.