Investigating the impact of geometric dimensions on the sensitivity of porous flexible capacitive pressure sensors

Abstract

Flexible sensing technology has wide applications in smart manufacturing and robotic artificial intelligence. Sensitivity is a crucial parameter for evaluating sensors. However, research on the impact of geometric dimensions of porous flexible sensors on sensitivity remains insufficient. In this study, we investigate the effect of dielectric layer height and electrode size on the sensitivity of porous flexible capacitive pressure sensors using the finite element method. Our results indicate that decreasing the dielectric layer height and increasing the electrode area leads to higher sensitivity.