Automated Micro‐ and Nanohandling Inside the Scanning Electron Microscope

Abstract

There are several considerable approaches to handle and manipulate nano-objects toward a seamless integration. However, general approaches from macroscopic handling and robotics, using different kinds of grippers and visual feedback, cannot be applied directly to the micro- and nanoscales. Instead, micro and nanohandling approaches take advantage of certain effects on the nanoscale. The apparent need of micro- and nanomanipulation can be particularly addressed by the scanning electron microscope (SEM). The SEM is originally a powerful tool for the acquisition of high-magnification images. One of the newly developed measurements is the transverse compression of single fibers with high-resolution cross-sectional imaging. This measurement is performed inside the SEM in low-vacuum mode for two reasons. First, the visualization of the fiber cross section requires high-resolution imaging and the SEM provides this necessary resolution. Second, the nonconducting sample fibers cannot be coated in order to avoid influences on the mechanical properties.