Design and Experimental Research on Flexible Capacitive Tactile Sensor Based on Micro-Electro-Mechanical-System

Abstract

With the increasing degree of social automation, various type of sensors play important roles in many fields, such as aerospace, robotics, medicine and biology, etc. Based on this, a capacitive flexible tactile sensor for pressure detection of robot hand is designed in this project. A sensor array with an area of 24mm*24mm 4*4 was fabricated by using micro-electro-mechanical-system technology. Through the finite element simulation analysis and experimental verification of the designed sensor, the results show that the sensitivity of the sensor is 23.75% / N, the range is 6N, the linear error is 9.09%, and the maximum error is 1.30%. The test results of response time and rebound time are 0.1s and 0.3s respectively. The device has reliable overall structure, full flexibility and excellent performance.