Transparent Flexible Capacitive Pressure Sensor Array

Abstract

The realization of electronic skin (e-skin) that resemble human skin is increasingly in demand, particularly for wearable health monitoring, robotics, and human-machine interfaces. However, it is challenging to fabricate a large area array of pressure sensors due to the mutual crosstalk between sensors. In this study, we present 4\times 4 transparent pressure sensor arrays developed using ITO-based electrodes and soft ecoflex as the dielectric. An interlayer of ZnO NWs was also introduced to improve the device’s performance. The sensor array exhibits an average capacitance of 9.4 pF and sensitivity of 0.16 kP$\mathrm{a}^{-1}$ between 0 to 7 kPa. The results show the potential of using the presented sensor arrays for shape identification applications.