MEMS Remote Centre of Compliance Design

Abstract

Manipulation of MEMS components is a highly delicate and precise operation. Whether this task is performed manually or automatically, precisely controlled machines are required to ensure smooth operation and prevent damage occurring to delicate MEMS parts. Remote Centre of Compliance (RCC) structures are commonly used to provide passive alignment correction for robotic manipulators during assembly or insertion operations. Incorporating an RCC into a MEMS manipulation system may alleviate the necessity of highly precise machine control and also reduce operator stress. The theory and the concept of a PolyMUMP compatible Micro-RCC are outlined in this paper. It was found that compliant structures that are composed of cantilever beams could readily be designed by using matrix structural analysis techniques. Location of the centre of compliance can be readily be achieved by utilizing different geometrical parameters of the compliant structure. A number of FEM tests were carried out to verify the mathematical model of the proposed MEMS RCC devices. The results have verified the accuracy of the mathematical model of the compliant structure that was outlined in the paper. Physical prototype fabrication is in progress, upon which these MEMS RCC devices will be extensively tested.