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DEVELOPMENT OF A MICRO TACTILE SENSOR UTILIZING PIEZORESISTORS AND CHARACTERIZATION OF ITS PERFORMANCE

Junya Izutani, Yutaka Maeda, Seiji Aoyagi

Year
2007
Citations
4

Keywords

Tactile sensorCharacterization (materials science)Diaphragm (acoustics)Distortion (music)Surface micromachiningProcess (computing)PillarChipMicroelectromechanical systemsComputer science

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