Patterning innovative conducting interpenetrating polymer network by dry etching

Abstract

Interpenetrating polymer networks, as biomimetic actuators, can become successful actuators in the field of microsystems providing they are compatible with micro-technologies. In this paper, we report a novel material synthesized from poly(3,4-ethylenedioxythiophene) and polyethylene oxide/nitrile butadiene rubber. The electroactive material is built as a pseudo trilayer and its lateral sides have been patterned using dry plasma etching at high etch rates and with vertical sidewalls. A chemical process and a “self-degradation” are proposed to explain such high etching rates. Preliminary actuation results show that micro-beams can move with very large displacements. These micro-sized actuators are potential candidates in numerous applications, including micro-switches, micro-valves, micro-optical instrumentation and micro-robotics.