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Feedforward compensation of the pose-dependent vibration of a silicon wafer handling robot

Cheng-Hao Chou, Chen Qian, Yung-Chun Lin, Shorya Awtar, Chinedum E. Okwudire

Year
2024
Citations
4

Keywords

WaferFeed forwardCompensation (psychology)VibrationRobotSiliconComputer scienceMechanical engineeringEngineeringMaterials science

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