Patterning process and actuation in open air of micro-beam actuator based on conducting IPNs

Abstract

We report on new method to obtain micrometric electroactive polymer actuators operating in air. High speed conducting Interpenetrating Polymer Network (IPN) microactuators are synthesized and fully characterized. The IPN architecture used in this work allows solving the interface and adhesion problems, which have been reported in the design of classical conducting polymer-based actuators. We demonstrated that it is possible to reduce the thickness of these actuators by a specific synthetic pathway. IPN host matrixes based on polyethylene oxide / polytetrahydrofurane have been shaped by hot pressing. Then, the resulting thin host matrixes (below 10 μm) are compatible with the microfabrication technologies. After interpenetration of poly(3,4-ethylenedioxythiophene) (PEDOT), these electroactive materials are micro-sized using dry etching process. Frequency responses and displacement have been characterized by scanning electronic microscopy. These conducting IPN microactuators can be considered as potential candidates in numerous low frequency applications, including micro-valves, micro-optical instrumentation and micro-robotics.