Simple Fabrication Process for High-Sensitive Flexible Capacitive Force Sensor Using PDMS

Abstract

This paper presents a simple approach to fabricating a flexible interdigital capacitive force sensor (FCIFS) by eliminating the need for a sacrificial layer. The fabricated sensor exhibits exceptional sensitivity and dynamic response within a specific force range. Characterization under normal load demonstrates a significant capacitance change, surpassing the performance of previous studies. Notably, the sensor achieves a force range of 0.2-3.5 N, a maximum sensitivity of 32.44% IN, and a rapid response and relaxation time of 60 ms. The study further explores the theoretical relationship between capacitance and force, providing valuable insights into the sensor's design and fabrication strategy. With its remarkable capabilities, this sensor holds great promise for a wide range of applications in biomedical engineering, force myography, and soft robotics.