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Empowering Robots for Multimodal Tactile Gripping using Capacitive Micromachined Ultrasonic Transducers

Sandro G. Koch, U. Völz, Nicolas Lange, Sören Köble, Frank Schubert, Christian Richter, Prajith Kumar Poongodan, Frank Vanselow, Christoph Urbahn

Year
2021
Citations
12

Abstract

A new technology platform is presented that utilized capacitive micromachined ultrasonic transducers (CMUT) for the on-chip integration of proximity and tactile sensing. This platform integrated in robotic grippers enables tactile and reactive grasping. A single channel proximity system is demonstrated to distinguish objects and reveal high spatial resolution to distances of 10 mm.

Keywords

Capacitive sensingCapacitive micromachined ultrasonic transducersTactile sensorUltrasonic sensorGrippersProximity sensorTransducerSurface micromachiningAcousticsRobot

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