PocketFactory : a modular and miniature assembly chain including a clean environment

Abstract

Abstract- The manipulation and assembly of microsystems (MEMS) require accurate robots operating in a clean room environment. Available systems require usually large ground surface for small components and are bulky. Furthermore it is difficult to move it to another place. The main objective of the 'Pocket-factory ' project is to develop miniaturized and modular clean production units for microsystems and establish a data base of needs and available accessories to quickly set up a production chain. Index Terms- Pocket-Factory, minienvironment, clean room,