A Flexible Piezocapacitive Pressure Sensor with Microsphere-Array Electrodes

Abstract

Flexible pressure sensors that emulate the sensation and characteristics of natural skins are of great importance in wearable medical devices, intelligent robots, and human–machine interfaces. The microstructure of the pressure-sensitive layer plays a significant role in the sensor’s overall performance. However, microstructures usually require complex and costly processes such as photolithography or chemical etching for fabrication. This paper proposes a novel approach that combines self-assembled technology to prepare a high-performance flexible capacitive pressure sensor with a microsphere-array gold electrode and a nanofiber nonwoven dielectric material. When subjected to pressure, the microsphere structures of the gold electrode deform via compressing the medium layer, leading to a significant increase in the relative area between the electrodes and a corresponding change in the thickness of the medium layer, as simulated in COMSOL simulations and experiments, which presents high sensitivity (1.807 kPa−1). The developed sensor demonstrates excellent performance in detecting signals such as slight object deformations and human finger bending.