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Realization and performance evaluation of a machine tool vibration monitoring module by multiple MEMS accelerometer integrations

Jui-Min Tsai, I.-Chun Sun, Kuo‐Shen Chen

Year
2021
Citations
32

Keywords

AccelerometerMachine toolMicroelectromechanical systemsVibrationPiezoelectric accelerometerNoise (video)Condition monitoringEngineeringReliability (semiconductor)Ball screw

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