Digital Optical 1¿N MEMS Switch Utilizing Microassembled Rotating Micromirror

摘要

We present a new novel design for a 1timesN digital optical space MEMS switch with a large number of output ports. The switch employs a single rotating micromirror. The rotating micromirror consists of a novel electro-static rotary motor, onto which a 3D mirror structure is assembled using a robotic-based microassembly process. The rotating mirror in the switch can digitally rotate with 480 steps per full revolution in 14.4 msec. A 1.04 dB uniform coupling loss across all output ports is achieved