A finite state machine for controlling untethered scratch-drive micro-robot

摘要

This paper describes finite state machine (FSM) to model the operation of novel untethered scratch drive micro-robot. Micro-robot consists of three scratch drive actuators (SDA) and two steering arms with dimension of 365 m times 78 m fabricated monolithically by commercially available PolyMUMPs process and deposited with dielectric layer in the post process. The micro-robot brain is programmed by FSM models with seven state machines and a set of ten voltage levels to control the movement of micro-robot in forward, reverse, left and right direction. The entire motion of micro-robot is controlled by delivering power via capacitive coupling with underlying electric grid, to the micro-robot.