High Precision Robotics System for Scanning Electron Microscopes

摘要

In this paper we present our latest developments in high precision positioning and handling systems operating inside an SEM. The Laboratory in Scanning Electron Microscope concept (LAB-in-SEM) is proposed along with a description of our piezodriven manipulators. Nano-material testing such as in-situ indentation and scratch have been conduct with our systems and are briefly related here. Finally, the preliminary tests of the tele-operated assembly of carbon nanotubes on AFM tips are described.These results will permit the development of an automatic nanotubes assembly system.