Automatic Micro-Robotic Identification and Electrical Characterization of Graphene

摘要

Micromechanically exfoliating graphene on S i / S i O 2 substrates is commonplace for graphene researchers, but locating actual graphene flakes on these substrates is a high-effort and tiresome task. The main purpose of this work was to establish a completely automated procedure to identify those graphene flakes with as little human interaction as possible, improving on the limitations of current methods. Furthermore, automatic electrical characterization of the identified flakes was performed. The proposed micro-robotic automation sequence consists of three main steps. To start, a sample surface plane is calculated, based on multiple foci points across the substrate. Secondly, flakes on the substrate are identified in the hue, saturation, and value (HSV) color space, with an implementation to fit the measurement probe, used to avoid undersized samples and adjust the flake orientation. Finally, electrical characterization is performed based on four point probe measurements with the Van der Pauw method. Results of the successfully implemented automation sequence are presented together with flake electrical properties and validation.