Polishing robot based on FJP with in situ monitoring system

摘要

A polishing robot, using the fluid jet polishing technique (FJP), in combination with in-situ monitoring systems will be presented. One of the monitoring systems is used to check the surface roughness, while the other checks the local removal. Owing to this removal monitoring system the presented system is ideally suited for corrective polishing applications where normally a time consuming iterative approach would be required.