Challenge to micro/nanomanipulation using atomic force microscope

摘要

With the improving micro/nanotechnologies recently, micro/nanomanipulation technology has also become indispensable where such technology is in its early infancy. Thus, this presentation focuses on using Atomic Force Microscope (AFM) as a promising sensory robotic tool for challenging micro/nanomanipulation applications. AFM probe is proposed to be utilized as a mechanically contact pushing manipulator, and force and topology sensor. The focused task is the 2-D pushing of micro/nanometer size particles on a substrate in ambient conditions. Thus, the modeling of interaction forces and dynamics during pushing operation is analyzed for understanding the nano scale physical phenomenon which is different from macro robotics physics. Experiments of 2-D precise positioning of micro/nano gold-coated particles are reported. The results show that latex particles can be positioned on silicon substrates successfully, and AFM probe can be a promising sensory manipulator.