E-Skin Pressure Sensors Made by Laser Engraved PDMS Molds

摘要

This work describes the production of electronic-skin (e-skin) piezoresistive sensors, which micro-structuration is performed using laser engraved molds. With this fabrication approach, low-cost sensors are easily produced with a tailored performance. Sensors with micro-cones and a high sensitivity of −1 kPa−1 under 600 Pa are more adequate for the blood pressure wave detection, while sensors micro-structured with semi-spheres and a maximum sensitivity of −6 × 10−3 kPa−1 in a large pressure range (1.6 kPa to 100 kPa) are more suitable for robotics and functional prosthesis.