A highly sensitive capacitive flexible tactile sensor based on a composite dielectric layer with a C-type symmetrical structure for wearable electronics

摘要

Abstract In this work, a capacitive flexible tactile sensor based on the composite dielectric layer with a C-type symmetrical structure is proposed to improve the sensing performance through the introduction of a precise structure. Combined with simulations and experiments, the influence of the structural characteristics of the tactile sensor on its sensitivity is investigated, the correlation between the signal output of the sensor and the loading pressure is shown for different structural parameter designs, and the structure of the sensor is optimized. Data results display that the tactile sensor proposed in this work exhibits a lower detection limit (8.6 Pa) and an ultra-wide linear sensing range (8.6–500 kPa). In addition, from the 55 ms response time of the sensor and 2000 cycles of experiments, it can be concluded that the sensor possesses good repeatability and durability, and can achieve more accurate measurement results in motion detection, soft robots, and electronic skin.