Organic Piezoresistive Robotic Skin Sensor Fabrication, Integration and Characterization

摘要

Abstract Advanced applications for human-robot interaction require perception of physical touch in a manner that imitates the human tactile perception. Feedback generated from tactile sensor arrays can be used to control the interaction of a robot with their environment and other humans. In this paper, we present our efforts to fabricate piezoresistive organic polymer sensor arrays using PEDOT: PSS or poly (3,4-ethylenedioxythiophene)-poly(styrenesulfonate). Sensors are realized as strain-gauges on Kapton substrates with thermal and electrical response characteristics to human touch. In this paper, we detail fabrication processes associated with a Gold etching technique combined with a wet lift-off photolithographic process to implement a circular tree designed sensor microstructure in our cleanroom. The testing of this microstructure is done on a load testing apparatus facilitated by an integrated circuit design. Furthermore, a lamination process is employed to compensate for temperature drift while measuring pressure for double-sided sensor substrates. Experiments carried out to evaluate the performance of the fabricated structure, indicates 100% sensor yields with the updated technique implemented.