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Design and fabrication of a flexible three-axial tactile sensor array based on polyimide micromachining

Hyun-Jun Kwon, Woo-Chang Choi

发表年份
2010
引用次数
15

关键词

PolyimideFabricationTactile sensorMultiplexerStrain gaugeMaterials scienceSurface micromachiningSensor arrayFlexibility (engineering)Microelectromechanical systems

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