Study on spherical stator for multidegree-of-freedom ultrasonic motor

摘要

Abstract A multidegree-of-freedom ultrasonic motor (MDOF-USM) has excellent features such as high torque at a low speed and a self-holding force, compared with other types of MDOF motor. Therefore, the MDOF-USM has been considered for applications in robot joints, multidimensional systems, and spacecraft. In previous research, the MDOF-USM consisting of a spherical rotor and a stator vibrator of various shapes has been mainly studied. In contrast, the MDOF-USM consisting of a spherical stator and a rotor of various shapes is proposed in this paper. The excitation methods for vibration modes and mode rotation using piezoelectric plates and multilayered piezoelectric actuators were examined. Furthermore, a stator support method that does not significantly affect the vibration of the sphere was devised. From the results of experiments using the fabricated prototype stator, the generation of vibration mode and mode rotation were confirmed. Therefore, the possibility of the realization of the MDOF-USM using a spherical stator was indicated.