Flexible micro-processing by multiple microrobots in SEM

摘要

We describe the newly developed flexible micro processing system assisted by 1 inch size robots in the scanning electron microscope (SEM). The basic performances of the small robot composed of piezo-elements and electromagnets are presented and then the magnetic shield property is considered to prevent the SEM image distortion due to magnetic flux. In order to handle some small objects, an electrostatic micromanipulator driven by the piezo-bimorph is also incorporated on the robot. The small sliding table on the robot can transport them at SEM focusing point accurately. This arrangement can allow the X-Y accurate positioning at any location within the chamber. On the sample table, a micromanipulator from another small robot can pick up and down the small objects simultaneously. In addition, the fiber guided YAG-laser is also employed to provide the micro-material abrasion. The operator can control each small robot easily with the help of the real time monitoring of SEM image and the PC assisted interface.