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Development of a force controlled orbital polishing head for free form surface finishing

Christian Brecher, Roland Tuecks, Richard Zunke, Christian Wenzel

发表年份
2010
引用次数
32

关键词

PolishingHead (geology)Mechanical engineeringProcess (computing)Surface roughnessAutomotive industrySurface finishComputer scienceEngineering drawingChemical-mechanical planarization

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