Automated 2D micro-assembly using diamagnetically levitated milli-robots

摘要

In this article, we demonstrate the application of diamagnetically levitated milli-robots for the 2D micro-assembly of 10-μm polymer microspheres and other silicon microfabricated parts. By using an optical microscope for feedback (imaged at 27 Hz), we are able to demonstrate long-term open-loop stability (up to 78 hr) and sub-micron stability of the levitated micro-robots. Furthermore, due to the low hysteresis and high compliance in the magnetic drive of the milli-robots, we are able to directly use the milli-robots in conjunction with machine vision as a force sensor. Soft polymer-based end effectors are used for the micromanipulation of parts and show modest reliability of pick (>70%) and high reliability of place (>99%) that is insensitive to the pick surface material. Finally, we implement autonomous micro-assembly from randomly deposited microspheres into ordered arrays.