A Multifunctional Flexible Tactile Sensor Based on Resistive Effect for Simultaneous Sensing of Pressure and Temperature

摘要

Abstract Flexible tactile sensors with multifunctional sensing functions have attracted much attention due to their wide applications in artificial limbs, intelligent robots, human‐machine interfaces, and health monitoring devices. Here, a multifunctional flexible tactile sensor based on resistive effect for simultaneous sensing of pressure and temperature is reported. The sensor features a simple design with patterned metal film on a soft substrate with cavities and protrusions. The decoupling of pressure and temperature sensing is achieved by the reasonable arrangement of metal layers in the patterned metal film. Systematically experimental and numerical studies are carried out to reveal the multifunctional sensing mechanism and show that the proposed sensor exhibits good linearity, fast response, high stability, good mechanical flexibility, and good microfabrication compatibility. Demonstrations of the multifunctional flexible tactile sensor to monitor touch, breathing, pulse and objects grabbing/releasing in various application scenarios involving coupled temperature/pressure stimuli illustrate its excellent capability of measuring pressure and temperature simultaneously. These results offer an effective tool for multifunctional sensing of pressure and temperature and create engineering opportunities for applications of wearable health monitoring and human‐machine interfaces.