Highly Sensitive Flexible Piezoresistive Pressure Sensor Developed Using Biomimetically Textured Porous Materials

摘要

In recent times, high-performance flexible pressure sensors that can be fabricated in an environmentally friendly and low-cost manner have received considerable attention owing to their potential applications in wearable health monitors and intelligent soft robotics. This paper proposes a highly sensitive flexible piezoresistive pressure sensor based on hybrid porous microstructures that can be designed and fabricated using a bio-inspired and low-cost approach employing the Epipremnum aureum leaf and sugar as the template. The sensitivity and detection limit of the obtained pressure sensor can be as high and low as 83.9 kPa–1 (<140 Pa) and 0.5 Pa, respectively. According to the mechanism and simulation analyses, the hybrid porous microstructures lower the effective elastic modulus of the sensor and introduce an additional pore resistance, which increases the contact area and conductive path with loads, thereby contributing to the high sensitivity that exceeds that of traditional microstructured pressure sensors. Real-time monitoring of human physiological signals such as finger pressing, voice vibration, swallowing activity, and wrist pulse is demonstrated for the proposed device. The high performance and easy fabrication of the hybrid porous microstructured sensor can encourage the development of a novel approach for the design and fabrication of future pressure sensors.