Yuanyuan Yan

Tsinghua University

Papers

2

Total Citations

27

H-Index

2

About

Yuanyuan Yan is a leading researcher in semiconductor manufacturing automation, with a core focus on the scheduling and optimization of multi-cluster tools. Her work addresses a critical industry shift from traditional cyclic production to noncyclic scheduling, which is essential for handling small lot sizes and diverse wafer types. Yan’s major contributions lie in developing Pareto optimization frameworks that solve the complex challenge of multi-robot coordination under strict residency constraints—where wafers must not exceed time limits in process chambers. Her 2020 paper on noncyclic scheduling with residency constraints has garnered 23 citations, establishing a foundational approach for flexible, high-efficiency manufacturing. In 2021, she extended this work to accommodate multi-type wafers, a response to the semiconductor industry’s growing demand for diversification and production efficiency. Yan’s research is notable for bridging theoretical optimization with practical industrial constraints, offering scalable solutions that improve throughput and reduce cycle times. Her work is widely cited by both academic researchers and industry engineers seeking to modernize cluster tool operations, marking her as a key contributor to the next generation of smart manufacturing systems.

Research Focus

Key Achievements

2
H-Index
2
Papers
27
Total Citations
14
Avg Citations/Paper
🏆 Most Cited Paper
Noncyclic Scheduling of Multi-Cluster Tools With Residency Constraints Based on Pareto Optimization
23 citations · 2020
📈 Most Prolific Year: 2020 (1 Papers)
🤝 Key Collaborators: 5
🏛 Institutions: Tsinghua University

Top Papers

  1. 1
  2. 2

Key Collaborators

Contact & Links

Available for collaboration
Content generated · 12 days ago