P. van der Meulen

Papers

Total Citations

H-Index

About

Dr. P. van der Meulen is a leading figure in semiconductor manufacturing systems engineering, with a primary focus on the modeling, analysis, and scheduling of advanced cluster tools. Their most influential work, "Throughput Analysis of Linear Cluster Tools" (2007, 34 citations), provides a foundational framework for understanding the steady-state performance of these complex, multi-chamber systems. By extending classical results for regular cluster tools to the more challenging linear configuration—which features single-blade robots and serial wafer flow—Dr. van der Meulen delivered critical analytical models that enable engineers to predict throughput bottlenecks and optimize scheduling policies. This contribution is vital for improving productivity in wafer fabrication, where even marginal efficiency gains translate to significant economic impact. Beyond this landmark paper, Dr. van der Meulen’s research continues to bridge the gap between theoretical operations research and practical tool design, making their work essential reading for both academics and industry practitioners seeking to push the limits of semiconductor manufacturing throughput.