Kyungsu Park

Agency for Defense Development, Korea Advanced Institute of Science and Technology

Papers

Total Citations

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About

Kyungsu Park is a researcher specializing in semiconductor manufacturing systems, with a particular focus on the scheduling, control, and performance modeling of cluster tools used in wafer fabrication. His work addresses some of the most operationally complex and capital-intensive equipment in modern semiconductor production, including clustered photolithography tools (CPTs) that can cost upwards of $100 million per unit. Park's most recognized contribution, "Controlled Wafer Release in Clustered Photolithography Tools" (2014, 26 citations), introduced flexible flow line job release scheduling and an LMOLP heuristic to maximize throughput in CPT operations—a practically significant advance given the immense cost of underutilizing such equipment. His earlier work on multi cluster tool wafer release control (2010) anticipated industry challenges surrounding the transition to 450 mm wafers and increasing customization demands, while his performance modeling research for dual-arm cluster tools (2011) sought to bridge the gap between computationally intensive methods like Petri nets and overly simplified analytical approaches. Collectively, Park's research provides semiconductor manufacturers with actionable, insight-driven tools for improving efficiency in critical fabrication processes, making his work valuable to both academic researchers and industry practitioners in manufacturing systems engineering.