Papers
3
Total Citations
39
H-Index
3
About
No biography available yet.
Research Focus
Distributed computing3 · 39 citations
Semiconductor device fabrication3 · 39 citations
Artificial intelligence3 · 39 citations
Wafer3 · 39 citations
Computer science3 · 39 citations
Throughput2 · 33 citations
Nanotechnology2 · 33 citations
Heuristic2 · 33 citations
Photolithography2 · 33 citations
Materials science2 · 33 citations
Engineering2 · 32 citations
Petri net2 · 32 citations
Key Achievements
3
H-Index
3
Papers
39
Total Citations
13
Avg Citations/Paper
🏆 Most Cited Paper
Controlled Wafer Release in Clustered Photolithography Tools: Flexible Flow Line Job Release Scheduling and an LMOLP Heuristic
26 citations · 2014
📈 Most Prolific Year: 2014 (1 Papers)
🤝 Key Collaborators: 2
🏛 Institutions: Agency for Defense Development, Korea Advanced Institute of Science and Technology
Top Papers
- 1
- 2Control of wafer release in multi cluster tools7 citations · 2010
- 3Performance models for dual-arm cluster tools6 citations · 2011
Key Collaborators
Not generated yet