Crosstalk-Free Large Aperture 2D Gimbal Micromirror

Abstract

This paper presents a crosstalk-free, large aperture (19x19 mm²) FPCB (flexible printed circuit board) 2D gimbal micromirror. The crosstalk-free is achieved through a novel arrangement of 6 brick shape permanent magnets and four layers of coils embedded in FPCB. The performance of the design was examined using FEM (finite element method) analysis and a prototype was built and tested. An optical FOV (field of view) of 36 degrees horizontal and 14 degrees vertical was obtained at 0.5V, 50Hz(resonance) and 2V, 1 Hz (quasi-static) respectively. The Large aperture size of the mirror makes it suitable for low vibration LiDAR (light detection and ranging) applications such as ground robotics.