New method for mass transfer of MicroLED

Abstract

The key problem that needs to be overcome in the industrialization process of MicroLED today is the mass transfer of MicroLED. Most of the current mass transfer methods cannot solve the problem that the distance between the MicroLED on the wafer and the target substrate in the X and Y directions is not equal. A set of mass transfer equipment including voice coil motors, SCARA robots was designed. A new method was proposed, which can realize the mass transfer of MicroLED on the wafer with different distances from the target substrate in the X and Y directions by stretching or shrinking the silicone PDMS film.