Test standard for light, electron and microwave microscopy to enable robotic processes

Abstract

We report on a test standard for different microscopic techniques combined onto one substrate. The patterns of the test standard are recognizable by image processing routines to provide robotic navigation inside Scanning Electron Microscopes. Here it can be used for high-resolution and astigmatism testing. In the center of this standard is a pattern of three different micro capacitance values. This enables high frequency calibration with a Vector Network Analyzer (VNA), one core element of Scanning Microwave Microscopes.