MEMS micro robot using MOSFET based pulse-type hardware neural networks for motion control

Abstract

Insects realize the autonomous operation using excellent structure and active brain control. We refer the small actuator and brain control to our robot system, and constructed the 4.0 mm square size micro robot system from silicon wafer by MEMS technology. The motion of the robot is controlled by MOSFET, based pulse-type hardware neural networks. The proposal circuit can direct implement on the silicon flame of the robot using the CMOS process. The fabricated micro robot was performed forward and backward locomotion, switched by the external trigger pulse without any software programs or A/D converters.