Single-pixel tactile sensor based on piezoelectric-charge-gated thin-film transistor

Abstract

In this work, we report on a novel approach to tactile sensing through an integrative sensor combing a dualgate thin-film transistor (TFT) with a piezoelectric film. By sensing the drain current change in the subthreshold region of the TFT upon applied force, the sensor can be very sensitive. Both simulation and experimental results have led us to expect an exponential change of the drain current as a result of the threshold voltage change with forces. In addition, the force-induced deformation can be mapped in a proposed pixelated array, which makes it promising for electronic skin applications in robotics.