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Automatic nanohandling station inside a scanning electron microscope

S. Fatikow, Th. Wich, St. Kray, H. Hülsen, T. Sievers, M. Jähnisch, V. Eichhorn

Year
2006
Citations
4

Keywords

NanoroboticsNanoindentationScanning electron microscopeMaterials sciencePiezoresistive effectMicroscopeRobotRobot end effectorNanotechnologyCarbon nanotube

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