Transfer Robot Task Scheduling in Semiconductor Manufacturing

Abstract

This paper studies a simultaneous scheduling of production and material transfer in a semiconductor manufacturing. The simultaneous scheduling approach has been recently adopted by warehouse operations, wherein transbots pick up jobs and deliver to pick-machines for processing that requires a simultaneous scheduling of jobs, transbots, and machines. However, both a large proportion of literature and real-world scheduling systems in semiconductor manufacturing consider only one side of the problem. We propose the most efficient solution for job shop scheduling problem (JSP) with transbots, significantly outperforming all other benchmark approaches in the literature.